Appointment of Works Contractor for the Refurbishment of Block A, E Beam Clean room at the Tyndall National Institute ,UCC

Tender description

The project is to refurbish an E Beam Laboratory/Clean room area in the Tyndall National Institute to facilitate the installation of new equipment which is due to be delivered in Q2 2019. The ELS-G100 Electron Beam and all associated equipment will be accommodated in the current E Beam location. The area will provide facilities for the new e-beam tool and ancillary equipment. The ELS-G100 will be supplied by Elionix http://www.sts-elionix.com/node/23. The E-Beam room is located in Block A Room G.02 directly adjacent to a public corridor with a confined footprint. The Area will also provide for Sample / wafer preparation involving: a. spin coating electron beam sensitive resist materials (using existing tooling) b. resist curing and development (requires a wet bench / fume hood / hotplates) c. cold development station (floor mounted) (existing) The Area will also require Bench space for: d. loading and unloading of wafers on to the electron Beam to sample holder e. optical inspection and basic metrology. They will also install a client issued new AHU to supply the clean room in a plant room off of the main boiler house in TNI and above an existing fab facility. They will also be required to complete the following works • All shutdowns and isolation's of exiting services. • Construction of the new lab in advance of ELS-G100 delivery. • Installation of a new AHU, Dehumidifier and all associated ductwork and equipment. • Decommissioning of the old AHU. • Demolitions and enabling works • Completion of the Clean room and all services post delivery. • Commissioning and testing of the Clean Room.