Hydrogen Gas Generator System (MOVPE Reactors)

Tender description

The requirement is for a high purity Hydrogen Gas generation system capable of producing a stable and uninterrupted flow of high purity hydrogen gas to multiple MOVPE reactors in a semiconductor manufacturing facility. Lot 1: An uninterrupted supply of hydrogen is essential to maintain the production capacity of the facility and the condition of the reactors. Reliability of hydrogen supply and availability of spares over a protracted life is crucial. The system provides hydrogen to semiconductor epitaxy reactors for 8 hours per day, 9-5, Monday to Friday. Outside these operating hours the system provides a lower rate of hydrogen to maintain conditions within the reactors. The system must be able to supply a variable flow-rate dependent on the number of reactors in operation and must be able to react rapidly to increased demand.