Tabletop metrology SEM

Tender description

A tabletop scanning electron microscope (SEM) is required for the characterisation and metrology of samples during fabrication within the ICS cleanroom. This tool is integral for the development control of semiconductor device processing and would allow for the standardisation of various techniques within the cleanroom. A tabletop SEM would be utilised in the imaging of device structures where a standard optical microscope would not be suitable. Optical microscopes are fundamentally restricted to resolve to minimum features, of the order of, 1um in size due to the limited resolving power of visible light. However, SEMs are capable of resolving features of the order of <100 nm which in many cases is essential to achieve the process capabilities of the cleanroom.