LEE905C RFQ for the Supply of an Oxidation Furnace for University College Cork (UCC)

Tender description

The Process & Product development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional Silicon microelectronics and Silicon MEMS to III-V photonic devices. Tenders are sought for a fully functional alloying/oxidation furnace system that can deliver controlled and repeatable alloying and/or wet oxidation processes of all materials that are processed in Tyndall’s Silicon and IIIV labs including GaAs, InP, GaN, SiGe, MoS2, Si, and SiC. The system must be able to handle circular substrates of 200mm, 150mm and 100mm and smaller sample pieces down to 5mm x 5mm.