LEE884C RFT for the Supply of a Rapid Thermal Anneal (RTA) System for University College Cork (UCC)

Tender description

The Process & Product development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional Silicon microelectronics and Silicon MEMS to III-V photonic devices. We wish to extend our capability in the area of rapid thermal annealing by purchasing a fully functional Rapid Thermal Anneal (RTA) system which will allow us to move our processing to a higher level in terms of substrate size, anneal uniformity and control. In summary; Tenders are sought for a fully functional Rapid Thermal Anneal system that can deliver controlled and repeatable anneal processes of all materials that are processed in Tyndall’s Silicon and IIIV labs including GaAs, InP, GaN, SiGe, MoS2, ITO, Si, amorphous Silicon, and SiC. The system must be able to handle circular substrates of 200mm, 150mm and 100mm and smaller sample pieces down to 5mm x 5mm.