Miscellaneous equipment

Tender description

The Process and Product development laboratories at Tyndall National Institute, UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional silicon microelectronics to Silicon MEMS to photonic devices. Photo-lithography is a key component in device fabrication and we are looking for a system for the application of photo-resist and other polymer coatings to substrates and the development of patterns post exposure. The Process and Product development laboratories at UCC, fabricate a wide variety of Semiconductor devices, ranging from traditional silicon microelectronics to Silicon MEMS to photonic devices. Photo-lithography is a key component in device fabrication and we are looking for a system for the application of photo-resist and other polymer coatings to substrates and the development of patterns post exposure. The system should be fully automated with software control for recipe generation and storage, the system must provide reliable and repeatable coating processes for a variety of polymers used in microelectronics, photonics and MEMS processing, wafer handling which facilitates processing of substrates that are thinner than the standard 100mm silicon wafers (525µm) would be desirable as would be the ability to carry out processing on both sides of the wafer without excessive backside defects from handling.