Closed tender

202122/547 Supply of up to four dry etch and deposition systems

Details

Buyer
University of Leeds
Value
GBP 25,000,000
Topic
Dry-etching equipment
Published
15 February 2022
Submission
16 March 2022
Source
uk:find_a_tender

Tender description

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD) Lot 1: NOTICE OF AWARD OF four dry etch and deposition systems, specifically: •A Deep-Silicon Reactive Ion Etcher (D-RIE) •An Inductively Coupled Plasma-RIE (ICP-RIE) •A parallel plate RIE •A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD) Additional information: To respond to this opportunity please click here: https://neupc.delta-esourcing.com/respond/ZA5CH77BT9

Timeline

  1. Tender published15 February 2022
    Current notice
  2. Submission date16 March 2022

About the buyer

University of Leeds is a public sector buyer in United Kingdom publishing tenders and awards on Stotles. Explore their procurement activity and find more opportunities like this one.

Relevant CPV codes

  • 22520000 · Dry-etching equipment

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