Evaportators

Tender description

We currently have a variety of metal deposition systems in the ICS cleanroom that cater for both research projects and commercial based work. Due to increasing demand we now require additional metal deposition systems for deposition by both e-beam and thermal sources and also PVD sputtered films. Lot 1: E-Beam System The system required is an e-beam source with two additional thermal sources. The evaporator must be capable of handling and processing fragile III-V semiconductor samples of around 1cm squared and wafers up to 150mm in diameter. The system is to be fully interlocked to protect system hardware from any service failure and to protect the user from electrical shock during maintenance procedures. Lot 2: PVD System The system required should be a PVD sputter system with four individual 3 inch targets. The evaporator must be capable of handling and processing fragile semiconductor samples of around 1cm squared and wafers up to 150mm in diameter.