X-ray Photoelectron Spectroscopy (XPS) System

Tender description

XPS instrument with monochromated Al Ka and a monochromated higher energy (photon energy >2.5 keV) X-ray source with coincident sample illumination areas. Instrument must be capable of using an existing argon cluster ion source (Kratos minibeam 6), and capable of using an existing analytical SEM/SAM electron source, and automatic transfer and analysis of three or more sample holders in vacuum. Lot 1: A high-performance electron spectrometer system combining state of the art multi-Xray-source XPS functionality. Ability to automatically park, load and analyse multiple sample holders in vacuum. Motorised, data-system-integrated control of 5-axis sample manipulator allowing automated angle-resolved spectroscopy and rotation during etching. Multi-technique capability including Auger electron spectroscopy (AES), scanning Auger microscopy (SAM), ultraviolet photoelectron spectroscopy (UPS) and ion scattering spectroscopy (ISS) on a bakeable ultra-high-vacuum chamber. Data system for full system control and automated data acquisition.