Benchtop Magnetron Sputtering System for Trinity College Dublin

Tender description

A benchtop magnetron sputtering tool is required for a research Lab setting. This is for high throughput testing of thin film stacks for optoelectronic applications. We need to be able to deposit metals, semiconductors, and insulators using the same tool. Ideally the tool should allow for programmable sequential deposition of alternating materials so that we can build up multilayer stacks. Additionally, co-deposition from two targets is also desirable. Thin film thicknesses will range from 1nm-100nm, and there should be reasonable sputtering rates to achieve these thicknesses. Heated stage, and ability for rotation are also desirable. The tool should include forming gases or at least ability to upgrade to allow forming gases such as O2 and Nitrogen.