Laboratory, optical and precision equipments (excl. glasses)

Tender description

The University of Strathclyde seeks a supplier to provide a multi-source electron beam metal evaporation system for semiconductor device research. The University of Strathclyde seeks a supplier to provide a multi-source electron beam metal evaporation system for semiconductor device research. The offered equipment must have these essential features: — full computer control, with recipe-driven mimic panel operation, — minimum of 4 electron-beam sources, compatible with metals including Pd, Ag, Ni, Au and Ti, — capacity for simultaneous deposition on multiple 100-mm diameter round substrates, — quartz crystal thickness monitoring, with dual sensors, — in situ ion cleaning option, — oil-free pumping system, — suitability for lift-off processing, ie. metal deposition over photo resist patterns.