Research, testing and scientific technical simulator

Tender description

We require a research-scale MOVPE reactor. This reactor must be large enough to satisfy the needs of the Epitaxy facility (high throughput, and multi-wafer capacity), but must be small enough that it does not have significant running costs or larger infrastructure requirements that we are not able to meet. The MOVPE process is complex and is intimately linked to the design of the reactor. We have 4 Aixtron reactors installed in the nanosciences building of which 2 belong to the National Epitaxy facility (NEF). Our technical staff have been trained on Aixtron reactors and long-standing experience of working with these reactors. We are currently training a cohort of PhDs for future sustainability, and transfer of this knowledge is critical. Repeating the comments from above, MOVPE is a complex process, and also has very significant H&S aspects that must be considered in their operation. So the value of this experience is extremely important both operationally and strategically. 1) We require a research-scale MOVPE reactor. This reactor must be large enough to satisfy the needs of the Epitaxy facility (high throughput, and multi-wafer capacity), but must be small enough that it does not have significant running costs or larger infrastructure requirements that we are not able to meet. 2) The MOVPE process is complex and is intimately linked to the design of the reactor. We require a manufacturer who has long-standing experience in the field, who are able to supply and guarantee our materials specifications from their reactor and who has a development laboratory in which the processes can be developed and proven in the factory before shipping. We also require a manufacturer who provides rapid response to service/maintenance requests and hence ideally has a technical support office in the UK or at least in Europe. 3) We have 4 Aixtron reactors installed in the nanosciences building of which 2 belong to the National Epitaxy facility (NEF). The nature of the NEF, which supplies research services to users throughout the UK, is that we are subject to strict KPIs and delivery targets. Hence we require significant back-up and deployable capacity in the facility to meet scheduling requirements. We therefore need a reactor that is compatible with our existing reactors in the facility to allow this. In particular, MOVPE is a highly specialised technique and it is unfortunate that each manufacturer's reactor behaves differently, such that there is no 'standard' process that is easily reproducible from one manufacturer to another. In the facility we want to have the same type of reactors installed (in particular showerhead reactors) so that we may seamlessly transfer growth recipes from one reactor to another, without the need for extensive/expensive development. This allows us to schedule user growth accordingly and is also a back-up for the Facility if one of the reactors fails. This is a significant need in terms of the purpose and role of the reactor. 4) In the same light, in order to obtain long term value for money in the Facility, having the same reactor type allows for common spare-parts, common infrastructure and common servicing/maintenance visits etc. Spare parts and repairs on MOVPE reactors is a major ongoing expense and this is a significant point from the perspective of budgeting (not just in the facility but for any future research grants associated with this reactor). 5) Our technical staff have been trained on Aixtron reactors and long-standing experience of working with these reactors. We are currently training a cohort of PhDs for future sustainability, and transfer of this knowledge is critical. Repeating the comments from above, MOVPE is a complex process, and also has very significant H&S aspects that must be considered in their operation. So the value of this experience is extremely important both operationally and strategically.