Atomic Layer Deposition System

Tender description

The Purchaser is inviting tenders on the terms set out in this further competition for the supply, delivery and installation of an Atomic Layer Deposition (ALD) system. The ALD will be placed in the Quantum Technology Centre (QTC) cleanrooms located in the Physics Department at Lancaster University. It will significantly enhance and complement the existing cleanroom facilities that include photo- and e-beam lithography, chemical wet etching, inductively coupled plasma (ICP) and reactive ion-etching (RIE), plasma-enhanced chemical vapour deposition (PECVD), sputtering, thermal and e-beam evaporation. The facilities are used for the processing of semiconductor, superconductor, 2-D material and organic devices. The Purchaser reserves the right not to award a contract following this tender, nor does it bind itself to accept the lowest price or any quotation. The contract awarded shall not be split in multiple suppliers to fulfil the options.