Expired contract

Laboratory, optical and precision equipments (excl. glasses)

Details

Supplier(s)
Nanobeam Limted
Value
GBP 1,392,000
Duration
6 months
Topic
Laboratory, optical and precision equipments (excl. glasses)
Published
9 October 2019

Tender description

Cardiff University is looking for a new electron beam lithography tool to increase the wafer area that can be continuously patterned, enhance the achievable resolution, and increase the throughput compared to our current EBL tool. The new tool should be a Gaussian beam tool capable of exposing 200 mm wafers with sub-10 nm line-widths and with sub-30 nm stitching and alignment capabilities. Cardiff University is looking for a new electron beam lithography tool to increase the wafer area that can be continuously patterned, enhance the achievable resolution, and increase the throughput compared to our current EBL tool. The new tool should be a Gaussian beam tool capable of exposing 200 mm wafers with sub-10 nm line-widths and with sub-30 nm stitching and alignment capabilities.

Timeline

  1. Completed: Award published9 October 2019
    Current notice
  2. Completed: Award date9 October 2019
  3. Completed: Contract expiry date6 April 2020

About the buyer

Cardiff University is a public sector buyer in United Kingdom publishing tenders and awards on Stotles. Explore their procurement activity and find more opportunities like this one.

Relevant CPV codes

  • 38000000 · Laboratory, optical and precision equipments (excl. glasses)

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