UCC - Supply of an Abatement System(s) for Etch Tools

Tender description

The Tyndall National Institute, University College Cork (UCC) require the provision, installation and commissioning of a fully functional dry Abatement System(s) for Gaseous waste from 4 Plasma Etch tools, consisting of 2 x Si Etch Systems, 1 x III-V Etch System and 1 x Dielectric Etch Systems. The abatement system(s) must include End Point Detection. A system(s) that can be expanded to meet the output from future tools as they are purchased would be a distinct advantage. UCC are happy to consider options where Tenderers can propose a single Abatement System or multiple Abatement Systems, if both are available. UCC will allow for proposals for one abatement system to cover all requirements and alternatively, multiple systems to cover all requirements once the requirements outlined in the specifications can be met.