Provision of a 200mm Stylus Profiler

Tender description

The University has seen increased success in recent years with the securing of ongoing research works and projects. Along with the increased work, this tender requirement is for a 200mm Long Travel Stylus Profiler. The acquisition of this equipment will support the facility's transition towards being fully 200mm wafer capable and will provide a method of measuring 3D wafer stress. The University of Southampton Nanofabrication Facility would like to move towards being fully 200mm wafer capable. The acquisition of the Stylus Profiler, is essential to the University of Southampton especially the Cleanroom to allow validation of complex processes. This equipment will strengthen the core metrology in this area and future proofing of the building blocks of the facility that allow our users to reach far more advanced devices and functionality. One of the core measurements include determining the thickness of deposited and etched layers in a cleanroom. Full specification can be found in Appendix 1