Provision of a 200mm Resist Processing Station

Tender description

The Zepler Institute (ZI) is a multidisciplinary research centre that brings together the University's expertise in photonics, quantum technologies and nanoscience. The ZI has two main roles firstly, to increase the diversity and extent of cross-disciplinary research and the related funding, and secondly, to develop and manage the clean rooms. The Zepler Institute (ZI), University of Southampton has secured funds to purchase a resist processing station for use in state of the art nanofabrication research. A new resist processing station is required to be installed in the nanofabrication cleanroom located in: University of Southampton, Highfield, Southampton, SO17 1BJ. It is intended for use by a variety of users, ranging from inexperienced PhD students to experienced process engineers so must be of sufficient design to include necessary safeguards, either hardware or software, to prevent inadvertent damage to the tool.