Instruments for checking physical characteristics

Tender description

The University of Manchester intends to purchase a platform for nanoscale advanced material engineering. The system will be capable of handling samples with up to 150 mm diameter. It will be fitted with an interchangeable liquid metal ion source incorporating a built in mass filter for isotopic selection of ion species for the ion implantation. Operation of the sources will be possible at energies from 10 KeV to 30 KeV and it will enable the selection of differently charged species of the same atom when they are available. Suitable ion sources will be made available to enable the implantation of Au, Ge, Si, P, Bi and other atomic species. It will enable pulsing of the ion beam to produce pulses of ions, to implant a feature with a predetermined known dose of ions ranging from 1 to 10E15 ions per cm squared. Material engineering research. Bespoke item The system will incorporate an electron beam system with 20 nm resolution to allow independent imaging of the substrate and samples to enable the location of the target for implantation to be identified. A suitable instrument platform will be provided compatible with achieving 20 nm resolution that incorporates motorised sample handling with optical encoders.