Industrial or laboratory furnaces, incinerators and ovens

Tender description

The Zepler Institute (ZI) at the University of Southampton is a multidisciplinary research centre that brings together the University's expertise in photonics, quantum technologies and nanoscience. The ZI has two main roles; first, to increase the diversity and extent of cross-disciplinary research and the related funding, and secondly, to develop and manage the clean rooms. The Zepler Institute (ZI), University of Southampton has secured funds to purchase a high performance, flexible, 200 mm oxidation furnace for use in state of the art nanofabrication research. The Zepler Institute (ZI) at the University of Southampton is a multidisciplinary research centre that brings together the University's expertise in photonics, quantum technologies and nanoscience. The ZI has two main roles; first, to increase the diversity and extent of cross-disciplinary research and the related funding, and secondly, to develop and manage the clean rooms. The Zepler Institute (ZI), University of Southampton has secured funds to purchase a high performance, flexible, 200 mm oxidation furnace for use in state of the art nanofabrication research. All suppliers must meet the following Mandatory Requirements: Hardware Specification Mandatory Requirements: * Furnace tube of sufficient dimensions to be able to process a minimum of 25, 200 mm wafers. * Automatic cantilever system to load/unload wafer boats with system being controlled from remote computer. * Minimum temperature capability of 1100 °C, with minimum temperature variation of 2 °C within the flatzone. Vendors should state the maximum temperature capability, the length of the flatzone and temperature variation within this zone at the maximum temperature. * Must be capable of growing high quality dry and wet oxides. For wet oxidation, vendors should supply the method employed to produce the oxidising environment, such as DI bubbler, external torch etc. * Gas train must be via fully orbital welded, electro-polished 316L stainless steel with VCR fittings used at any removable component connection points. * Gas train must also be fitted with high purity point of use gas filters. * Minimum of four mass flow controlled gas lines (not counting the wet oxidation delivery system), N2 and O2, Ar and forming gas * Due to space restrictions, system must be of compact design and must be stackable on an existing Expertech CTR200 furnace * Must be able to interface with existing Expertech CTR control computer and software * An additional three year maintenance agreement option, over and above any manufacturer's warranty, must be provided. Performance Mandatory Requirements: * Must provide high precision growth of silicon dioxide films over entire substrate area. WIW uniformity of 3 % across 200 mm wafer with 5 mm exclusion zone. * Must provide repeatable oxide growth wafer to wafer. WTW uniformity of 3 %, demonstrable for both wet and dry oxidation. Software Mandatory Requirements: * System must be controllable via the existing Expertech main computer and software Other General Requirements: * Must be of robust construction and demonstrate a machine up time of at least 90 % on the condition that recommended preventative maintenance/servicing is carried out. Such recommended maintenance/servicing should be supplied with any quote along with associated costs. The up-time figure excludes any scheduled maintenance but will include unscheduled service calls. — Be of sufficient design to allow minimal downtime associated with component changes, ease of quartzware change is of paramount importance. Delivery, Installation, Commissioning and Training: — The installation and commissioning shall be carried out by a competent engineer — The successful supplier will provide all necessary protection to prevent damage to the equipment and University premises and property during delivery and installation of the equipment. The successful supplier will also be expected to have insurance to cover injury to staff, students & visitors and damage/loss to University property and premises caused by their staff or sub-contractors during the delivery and installation. — When the furnace is fully installed and operating to specification, to the satisfaction of the Zepler Institute researchers, this will be regarded as acceptance of the equipment and the beginning of the warranty.