Laboratory tool carriers

Tender description

PURCH1469 Provision of an Electron Beam Lithography Tool. Tender documents available from Public Contracts Scotland. Tender returns should be submitted via Public Contracts Scotland, no paper copies will be accepted. Should paper tenders be submitted, they will be rejected. Further to this any questions or communications regarding individual tender exercises must be sent via the Public Contracts Scotland Portal. Tender queries received through any other channel will not be answered. Should users of Public Contracts Scotland have any problems with the web site they should contact website Support Desk, contact details can be found by following the ‘Contact Us’ option on the left hand menu at http://www.publiccontractsscotland.gov.uk/default.aspx The University of Glasgow is looking for a new electron beam lithography tool to replace its ageing VB6 tool within the James Watt Nanofabrication Centre (JWNC). The new tool should be a Gaussian beam tool capable of exposing 200 mm wafers with sub-10 nm line-widths and with sub-30 nm stitching and alignment capabilities.