Closed tender

Inductively-Coupled Plasma Reactively Ion Etching (ICP-RIE) System

Details

Buyer
University of Bristol
Value
GBP 350,000
Topic
Laboratory, optical and precision equipments (excl. glasses)
Published
23 December 2016
Submission
30 January 2017
Source
ContractsFinder

Tender description

We want to acquire an Inductively-Coupled Plasma Reactively Ion Etching (ICP-RIE) system. The system should be able to etch the surface of samples utilising RIE physical-chemical mechanism. The System will be located in a class 10000 cleanroom space and will be operated by students and technical staff. The System should integrate smoothly with the existing facilities without any prejudice for the normal operation. The main purpose for the System is the definition of silicon and silicon-related waveguide structures for integrated quantum photonics applications. Such structures are typically defined on 6-inch silicon-on-insulator wafers with 220nm-thick crystalline silicon films. The system should excel at verticality (

Timeline

  1. Tender published23 December 2016
    Current notice
  2. Submission date30 January 2017

About the buyer

University of Bristol is a public sector buyer in United Kingdom publishing tenders and awards on Stotles. Explore their procurement activity and find more opportunities like this one.

Relevant CPV codes

  • 38000000 · Laboratory, optical and precision equipments (excl. glasses)

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