Rotating evaporators

Tender description

A Dielectric Thin film vacuum deposition system. This is a multi-technique system to deposit thin films of materials such as SiO2, SiN, HfO etc onto semiconductor and dielectric substrates, often Si, GaAs or sapphire and typically 500um thick and 4” diameter but of varying sizes. The deposition takes place within a vacuum environment. The purpose of these films will be as optical coatings, electrical insulators, mechanical layers and as mask layers amongst other uses. The rotating holder for the substrates should allow sequential deposition of layers as well as improving uniformity depending on the requirements.