Laboratory, optical and precision equipments (excl. glasses)

Tender description

Ultra-High Vacuum Sputter Deposition System (will be referred to as The Suite here after) for superconducting ultra-thin film (< 10 nm) deposition. The Suite will be located in a class-10000 cleanroom space and will operate continuously for crystalline and/or amorphous superconducting ultra-thin (will be referred as thin film shortly from here on) film deposition on semiconductor substrates. The dimensions of the equipment should not exceed 2.7 m x 2.0 m x 2.1 m (W x L x H, for W: width, L: length and H: height). One Sputter-Deposition Suite Operating in an Ultra-High Vacuum Regime.