SUPPLY AND INSTALLATION OF 3D LASER LITHOGRAPHY SYSTEM TO THE UNIVERSITY OF BIRMINGHAM

Tender description

The University of Birmingham invites tenders for supply of a - Fastest, most precise and sophisticated 3D laser lithography system for two-dimensional as well as three-dimensional micro- and nanofabrication. o Pulsed laser system with safety level: Laser class 1 o Laser scan speed: >10 mm/s o Laser with a two-photon polymerization o Lithography accuracy range: submicrometer- to meso-scale, 3 order of magnitude o Lithography minimum lateral features sizes for 2D structure: < 200 nm; for 3D: <= 200 nm o Lithography minimum features sizes for 3D structure in z direction: < 800 nm o Lithography minimum in-plane line distance: < 500 nm o Motorized stage with patterning area >= 100 x 100 mm2, with microscope, integrated camera and LED for region identification and alignment with markers and including rotation and stretching operations o Largest unit structure in 2D mode: >= 400 x 400 um2; in 3D mode: >= 300 x 300 x 300 um3 o Highest structure writing in z direction: >= 3 mm o Different sample holders o Flexible photoresist: generally commercial positive or negative photoresists (AZ resists, SU-8, etc.), and advanced resist which is without spin-coating, softbake, post-exposure bake processes o Fully computer controlled system with corresponding software which is flexible for pattern design files (123D CAD, SolidWorks, Blender, etc.) o Software contains native pattern designer and Pattern designer is 3D-visualized o Autofocus system: auto-recognize the interface of resist and substrate o Automatic error correction: when designed pattern exceeds the scanning size o Intelligent algorithms software: support large volume structure with high writing speed, o System error tolerance: constant aberration along the optical axis (>= 3 mm)