Spin Coater & Bake System

Tender description

A hotplate and a spin coater system that will enable preparation of uniform and reproducible electron sensitive polymer coating on various sized chips from a few cm2 in area up to 4 inches in diameter. Ideally the hotplate unit would allow multiple sample mounting of diced 4” wafer (where substrate thickness will always be thinner than 1 mm) and both units would allow the user to save ≥ 20 recipes with 5 successive steps each. Both units will be located in 10000 class cleanroom and therefore should be compatible with the cleanroom 10000 class specifications.