Electrical equipment and apparatus

Tender description

The University of Surrey through its Advanced Technology Institute has been funded to upgrade 1 of its ion implanters housed within the EPSRC Ion Beam Centre National Facility. Funding exists to replace the beamline and sample implantation end station, increasing the sample handling size and capacity to 7 x 200 mm wafers on its High Voltage Engineering Europa (HVEE) 2MV VdG accelerator and to integrate the existing beamline onto its HVEE 2MV Tandetron accelerator. The systems will be integrated into the proprietary control systems on both tools with a new analysing magnet power supply and control system enabling automated mass scanning. The end station must be capable of performing implantation at low temperature (liquid nitrogen) and up to 8000°C under closed loop control.